Azbil Launches New Sapphire Capacitance Diaphragm Gauges with MEMS Pro…

Azbil Corporation (TOKYO:6845) announced the availability as of January 25 of its model V8 sapphire capacitance diaphragm gauges, which employ MEMS*1 processing technology to enhance resistance to deposition*2 on the sensor. As part of the continuing evolution of semiconductor manufacturing, the front-end film deposition and etching processes now use a wider variety of gases. Depending on the process gas used, film deposits may form on the sensor diaphragm of the vacuum gauge used in these pr...